Our Portfolio for Semiconductor Industry
Semiconductors are a subgroup of the electrical and electronics industry. They have the properties both of non-conductors (insulators) and of conductors. At low temperatures, semiconductors become insulators, whereas their conductivity increases as they become hotter.
VOC control solutions for semiconductor and micro-chip production
In the production of semiconductor chips and other electronics, various pollutants like volatile organic compounds (VOCs), acids and NOx are emitted at various stages of the process. From the thin film deposition process through photolithography and the thin film etching, different solvents need to be controlled.
Emissions are collected from:
- Deposition Phase: Applying a light-sensitive resin to protect certain areas of the semiconductor wafer.
- Photolithography Phase: Exposing the resin through a mask designed to outline the device configuration.
Acid and ammonia scrubbers primarily treat exhaust from manufacturing equipment during:
- Etching Phase: Removing the sensitized resin and etching of silicon oxide, crucial for device fabrication.
- CMP Step: Thinning of layers carried out on the entire surface of the wafer in an automatic system by a chemical-mechanical process.
Thermal oxidizers and concentrators
Dürr provides concentrators, scrubbers, carbon adsorption solvent recovery, separation, and purification technologies along with oxidation as needed. Dürr analyzes your process and selects the best technologies for your emission composition, backed by a global in-house service and replacement parts organization to support your maintenance needs.
Carbon adsorption systems, both regenerative and non-regenerative, capture vapor-phase emissions of volatile organic compound (VOC) solvents from solvent-based processes. The solvents are prevented from entering the atmosphere, to ensure compliance with environmental laws and regulations. In a regenerative carbon adsorption system, solvents are adsorbed on activated carbon. When the carbon is saturated with the solvent, it is regenerated with steam and the solvent is recovered as the steam condenses.
Recent Dürr projects in semiconductor chip production exhaust emissions controls include:
- Highly efficient vertical scrubbers for acids
- Selective catalytic reduction (SCR) systems for NOx
- VOC concentrator with electric heated oxidizer
- Heat recovery methods for concentrator regeneration
- Recuperative thermal oxidizer design for easy clean-out of silicone build-up
- Solvent recovery systems
- Particulate removal with scrubber and wet electrostatic precipitator (WESP) technologies
Dürr solvent recovery systems offer two key benefits: compliance with environmental regulations and reduced operating costs. Water-miscible solvents can be purified and reused on-site with our distillation equipment, yielding a positive ROI. Non-water miscible solvents can also be reused without additional processing.
Typical recovered solvents in microchip and semiconductor emission controls include propylene glycol mono-methyl ester acetate, isopropyl acetate, silane, monochlorosilane, disilane, dichlorosilane, acetone, ethyl lactate, and nearly all other types of hydrocarbons.
Dürr’s stand-alone distillation systems purify wastewater or solvent streams to make suitable for reuse or disposal, reducing disposal costs and purifying solvents in the semiconductor chip manufacturing process.
When a thermal oxidizer (TO) is selected as the best available technology, the system is designed for easy clean-out of silicone build-up from the semiconductor chip manufacturing process.
For sustainable and efficient emissions control solutions, Dürr offers dedicated in-house service and replacement parts organization to support ongoing maintenance needs, ensuring longevity and reliability of your abatement systems.
